diff --git a/targets/TARGET_Silicon_Labs/CMakeLists.txt b/targets/TARGET_Silicon_Labs/CMakeLists.txt
index 5d676af..6e4ca12 100644
--- a/targets/TARGET_Silicon_Labs/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/CMakeLists.txt
@@ -1,15 +1,12 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("EFM32" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_EFM32)
-endif()
+add_subdirectory(TARGET_EFM32 EXCLUDE_FROM_ALL)
+add_subdirectory(TARGET_SL_RAIL EXCLUDE_FROM_ALL)
 
-if("SL_RAIL" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_SL_RAIL)
-endif()
+add_library(mbed-silicon-labs INTERFACE)
 
-target_include_directories(mbed-core
+target_include_directories(mbed-silicon-labs
     INTERFACE
         .
 )
diff --git a/targets/TARGET_Silicon_Labs/TARGET_EFM32/CMakeLists.txt b/targets/TARGET_Silicon_Labs/TARGET_EFM32/CMakeLists.txt
index 61b5b63..c0f2326 100644
--- a/targets/TARGET_Silicon_Labs/TARGET_EFM32/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/TARGET_EFM32/CMakeLists.txt
@@ -1,15 +1,13 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("EFM32GG" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_EFM32GG)
-elseif("EFM32GG11" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_EFM32GG11)
-elseif("EFR32MG12" IN_LIST MBED_TARGET_LABELS)
-    add_subdirectory(TARGET_EFR32MG12)
-endif()
+add_subdirectory(TARGET_EFM32GG EXCLUDE_FROM_ALL)
+add_subdirectory(TARGET_EFM32GG11 EXCLUDE_FROM_ALL)
+add_subdirectory(TARGET_EFR32MG12 EXCLUDE_FROM_ALL)
 
-target_include_directories(mbed-core
+add_library(mbed-efm32 INTERFACE)
+
+target_include_directories(mbed-efm32
     INTERFACE
         .
         common
@@ -17,7 +15,7 @@
         trng
 )
 
-target_sources(mbed-core
+target_sources(mbed-efm32
     INTERFACE
         analogin_api.c
         analogout_api.c
@@ -95,3 +93,5 @@
         trng/sl_trng.c
         trng/trng_api.c
 )
+
+target_link_libraries(mbed-efm32 INTERFACE mbed-silicon-labs)
diff --git a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG/CMakeLists.txt b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG/CMakeLists.txt
index 6582285..09373e2 100644
--- a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG/CMakeLists.txt
@@ -1,34 +1,40 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("EFM32GG_STK3700" IN_LIST MBED_TARGET_LABELS)
-    target_include_directories(mbed-core
-        INTERFACE
-            TARGET_EFM32GG_STK3700
-    )
+add_library(mbed-1024k INTERFACE)
+
+if(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LINKER_FILE device/TARGET_1024K/TOOLCHAIN_ARM_STD/efm32gg.sct)
+    set(STARTUP_FILE device/TARGET_1024K/TOOLCHAIN_ARM_STD/startup_efm32gg.S)
+elseif(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LINKER_FILE device/TARGET_1024K/TOOLCHAIN_GCC_ARM/efm32gg.ld)
+    set(STARTUP_FILE device/TARGET_1024K/TOOLCHAIN_GCC_ARM/startup_efm32gg.S)
 endif()
 
-if("1024K" IN_LIST MBED_TARGET_LABELS)
-    if(${MBED_TOOLCHAIN} STREQUAL "ARM")
-        set(LINKER_FILE device/TARGET_1024K/TOOLCHAIN_ARM_STD/efm32gg.sct)
-        set(STARTUP_FILE device/TARGET_1024K/TOOLCHAIN_ARM_STD/startup_efm32gg.S)
-    elseif(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
-        set(LINKER_FILE device/TARGET_1024K/TOOLCHAIN_GCC_ARM/efm32gg.ld)
-        set(STARTUP_FILE device/TARGET_1024K/TOOLCHAIN_GCC_ARM/startup_efm32gg.S)
-    endif()
-endif()
-
-set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
-
-target_include_directories(mbed-core
+target_include_directories(mbed-1024k
     INTERFACE
         device
 )
 
-target_sources(mbed-core
+target_sources(mbed-1024k
     INTERFACE
         PeripheralPins.c
 
         device/system_efm32gg.c
         ${STARTUP_FILE}
 )
+
+mbed_set_linker_script(mbed-1024k ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+add_library(mbed-efm32gg990f1024 INTERFACE)
+
+target_link_libraries(mbed-efm32gg990f1024 INTERFACE mbed-efm32 mbed-1024k)
+
+add_library(mbed-efm32gg-stk3700 INTERFACE)
+
+target_include_directories(mbed-efm32gg-stk3700
+    INTERFACE
+        TARGET_EFM32GG_STK3700
+)
+
+target_link_libraries(mbed-efm32gg-stk3700 INTERFACE mbed-efm32gg990f1024)
diff --git a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG11/CMakeLists.txt b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG11/CMakeLists.txt
index 8e60de9..2ae2d9f 100644
--- a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG11/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFM32GG11/CMakeLists.txt
@@ -1,12 +1,7 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("EFM32GG11_STK3701" IN_LIST MBED_TARGET_LABELS)
-    target_include_directories(mbed-core
-        INTERFACE
-            TARGET_EFM32GG11_STK3701
-    )
-endif()
+add_library(mbed-efm32gg11 INTERFACE)
 
 if(${MBED_TOOLCHAIN} STREQUAL "ARM")
     set(LINKER_FILE device/TOOLCHAIN_ARM_STD/efm32gg11.sct)
@@ -16,17 +11,28 @@
     set(STARTUP_FILE device/TOOLCHAIN_GCC_ARM/startup_efm32gg11.S)
 endif()
 
-set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
-
-target_include_directories(mbed-core
+target_include_directories(mbed-efm32gg11
     INTERFACE
         device
 )
 
-target_sources(mbed-core
+target_sources(mbed-efm32gg11
     INTERFACE
         PeripheralPins.c
 
         device/system_efm32gg11b.c
         ${STARTUP_FILE}
 )
+
+target_link_libraries(mbed-efm32gg11 INTERFACE mbed-efm32)
+
+mbed_set_linker_script(mbed-efm32gg11 ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+add_library(mbed-efm32gg11-stk3701 INTERFACE)
+
+target_include_directories(mbed-efm32gg11-stk3701
+    INTERFACE
+        TARGET_EFM32GG11_STK3701
+)
+
+target_link_libraries(mbed-efm32gg11-stk3701 INTERFACE mbed-efm32gg11)
diff --git a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFR32MG12/CMakeLists.txt b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFR32MG12/CMakeLists.txt
index 1271b2e..8f8f3d1 100644
--- a/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFR32MG12/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/TARGET_EFM32/TARGET_EFR32MG12/CMakeLists.txt
@@ -1,12 +1,7 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("TB_SENSE_12" IN_LIST MBED_TARGET_LABELS)
-    target_include_directories(mbed-core
-        INTERFACE
-            TARGET_TB_SENSE_12
-    )
-endif()
+add_library(mbed-efm32mg12 INTERFACE)
 
 if(${MBED_TOOLCHAIN} STREQUAL "ARM")
     set(LINKER_FILE device/TOOLCHAIN_ARM_STD/efr32mg12p.sct)
@@ -16,17 +11,28 @@
     set(STARTUP_FILE device/TOOLCHAIN_GCC_ARM/startup_efr32mg12p.S)
 endif()
 
-set_property(GLOBAL PROPERTY MBED_TARGET_LINKER_FILE ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
-
-target_include_directories(mbed-core
+target_include_directories(mbed-efm32mg12
     INTERFACE
         device
 )
 
-target_sources(mbed-core
+target_sources(mbed-efm32mg12
     INTERFACE
         PeripheralPins.c
 
         device/system_efr32mg12p.c
         ${STARTUP_FILE}
 )
+
+target_link_libraries(mbed-efm32mg12 INTERFACE mbed-efm32)
+
+mbed_set_linker_script(mbed-efm32mg12 ${CMAKE_CURRENT_SOURCE_DIR}/${LINKER_FILE})
+
+add_library(mbed-tb-sense-12 INTERFACE)
+
+target_include_directories(mbed-tb-sense-12
+    INTERFACE
+        TARGET_TB_SENSE_12
+)
+
+target_link_libraries(mbed-tb-sense-12 INTERFACE mbed-efm32mg12 mbed-sl-rail-efr32-12)
diff --git a/targets/TARGET_Silicon_Labs/TARGET_SL_RAIL/CMakeLists.txt b/targets/TARGET_Silicon_Labs/TARGET_SL_RAIL/CMakeLists.txt
index 4394a33..08ccd59 100644
--- a/targets/TARGET_Silicon_Labs/TARGET_SL_RAIL/CMakeLists.txt
+++ b/targets/TARGET_Silicon_Labs/TARGET_SL_RAIL/CMakeLists.txt
@@ -1,18 +1,18 @@
-# Copyright (c) 2020 ARM Limited. All rights reserved.
+# Copyright (c) 2020-2021 ARM Limited. All rights reserved.
 # SPDX-License-Identifier: Apache-2.0
 
-if("EFR32_12" IN_LIST MBED_TARGET_LABELS)
-    if(${MBED_TOOLCHAIN} STREQUAL "ARM")
-        set(LIB_RAIL efr32-rf-driver/rail/TARGET_EFR32_12/librail_efr32xg12_release.ar)
-    elseif(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
-        set(LIB_RAIL efr32-rf-driver/rail/TARGET_EFR32_12/librail_efr32xg12_release.a)
-    endif()
+add_library(mbed-sl-rail-efr32-12 INTERFACE)
+
+if(${MBED_TOOLCHAIN} STREQUAL "ARM")
+    set(LIB_RAIL efr32-rf-driver/rail/TARGET_EFR32_12/librail_efr32xg12_release.ar)
+elseif(${MBED_TOOLCHAIN} STREQUAL "GCC_ARM")
+    set(LIB_RAIL efr32-rf-driver/rail/TARGET_EFR32_12/librail_efr32xg12_release.a)
 endif()
 
-target_link_libraries(mbed-core INTERFACE ${CMAKE_CURRENT_SOURCE_DIR}/${LIB_RAIL})
+target_link_libraries(mbed-sl-rail-efr32-12 INTERFACE ${CMAKE_CURRENT_SOURCE_DIR}/${LIB_RAIL})
 
 
-target_include_directories(mbed-core
+target_include_directories(mbed-sl-rail-efr32-12
     INTERFACE
         efr32-rf-driver/rail
         efr32-rf-driver/rail/ble