diff --git a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
index 944c8fc..c75d65f 100644
--- a/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M2351/TARGET_M23_NS/device/TOOLCHAIN_ARMC6/M2351.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2018-2019, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct b/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
index e8a86e0..4687145 100644
--- a/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M251/device/TOOLCHAIN_ARMC6/M251.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2019, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct b/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
index 699faa7..0e2e8e3 100644
--- a/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M261/device/TOOLCHAIN_ARMC6/M261.sct
@@ -1,4 +1,4 @@
-#! armclang -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m23
 
 /*
  * Copyright (c) 2019-2020, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct b/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
index d78f382..9f7520c 100644
--- a/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M451/device/TOOLCHAIN_ARM/M453.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 /*
  * Copyright (c) 2020, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct b/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
index f83d94d..c0b5592 100644
--- a/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
+++ b/targets/TARGET_NUVOTON/TARGET_M480/device/TOOLCHAIN_ARM_STD/M487.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 /*
  * Copyright (c) 2015-2016, Nuvoton Technology Corporation
diff --git a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
index bea9a12..b6788ca 100644
--- a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
+++ b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_SUPPORTED/NUC472.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 #if !defined(MBED_APP_START)
   #define MBED_APP_START 0x00000000
diff --git a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
index c2eaa21..108cdef 100644
--- a/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
+++ b/targets/TARGET_NUVOTON/TARGET_NUC472/device/TOOLCHAIN_ARM_STD/TARGET_NU_XRAM_UNSUPPORTED/NUC472.sct
@@ -1,4 +1,4 @@
-#! armcc -E
+#! armclang -E --target=arm-arm-none-eabi -x c -mcpu=cortex-m4
 
 #if !defined(MBED_APP_START)
   #define MBED_APP_START 0x00000000